TY  - JOUR
AU  - V. Lee
AU  - Eric Lin
AU  - Barry Bauer
AU  - Wen-Li Wu
AU  - B Hwang
AU  - W Gray
C2  - Applied Physics Letters
DA  - 2003-02-01 00:02:00
LA  - en
M1  - 82
PB  - Applied Physics Letters
PY  - 2003
TI  - Characterization of Chemical-Vapor-Deposited Low-K Thin Films Using X-Ray Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852082
ER  -