TY  - CONF
AU  - Bala Muralikrishnan
AU  - Jack Stone Jr.
AU  - John Stoup
C2  - Proceedings of the Annual Meeting of the American Society for Precision Engineering 2006, Monterey, CA, USA
DA  - 2006-01-01 00:01:00
LA  - en
PB  - Proceedings of the Annual Meeting of the American Society for Precision Engineering 2006, Monterey, CA, USA
PY  - 2006
TI  - Enhanced Capabilities of the NIST Fiber Probe for Microfeature Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823213
ER  -