TY  - ICOMM
AU  - Donna Le
AU  - Nicholas Dagalakis
AU  - Jason Gorman
AU  - Jae Yoo
C1  - http://www.isd.mel.nist.gov/meso_micro/
C2  - Precision Meso/Micro Systems for Nanomanufacturing
DA  - 2009-08-12 00:08:00
LA  - en
PB  - Precision Meso/Micro Systems for Nanomanufacturing
PY  - 2009
TI  - Performance of a Nanopositioner Controller Filter Compensator
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824745
ER  -