TY  - CONF
AU  - Kenneth Kreider
AU  - Dean Ripple
AU  - D DeWitt
C2  - TEMPMEKO '99, The 7th International Symposium on Temperature and Thermal Measurements in Industry and Science, Delft, NL
DA  - 1999-06-01
LA  - en
PB  - TEMPMEKO '99, The 7th International Symposium on Temperature and Thermal Measurements in Industry and Science, Delft, NL
PY  - 1999
TI  - Calibration of Thin-Film Thermocouples on Silicon Wafers
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830629
ER  -