TY  - JOUR
AU  - Q Pan
AU  - G Gonzalez
AU  - R Composto
AU  - William Wallace
AU  - B Arkles
AU  - L Figge
AU  - D Berry
C2  - Thin Solid Films
DA  - 1999-01-01 00:01:00
LA  - en
M1  - 345
PB  - Thin Solid Films
PY  - 1999
TI  - Spin-on-Glass Thin Films Prepared From a Novel Polysilsesquioxane by Thermal and Ultraviolet-Irradiation Methods
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851493
ER  -