TY  - CONF
AU  - V Tsai
AU  - Theodore Vorburger
AU  - P Sullivan
AU  - Ronald Dixson
AU  - Richard Silver
AU  - Edwin Williams
AU  - J Schneir
C2  - Proceedings of American Society for Precision Engineering, Unknown, 1, USA
DA  - 1996-01-01 00:01:00
LA  - en
M1  - 14
PB  - Proceedings of American Society for Precision Engineering, Unknown, 1, USA
PY  - 1996
TI  - Height Calibration of Atomic Force Microscopes Using Silicon Atomic Step Artifacts
ER  -