TY  - JOUR
AU  - Safak Sayan
AU  - Deane Chandler-Horowitz
AU  - Nhan Nguyen
AU  - James Ehrstein
AU  - Mark Croft
C2  - Journal of Vacuum Science and Technology A
DA  - 2008-02-12 00:02:00
LA  - en
M1  - 26
PB  - Journal of Vacuum Science and Technology A
PY  - 2008
TI  - High Sensitivity FTIR-ATR Study of Ultra-Thin Zr02 Films: A Study of Phase Change
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32303
ER  -