TY  - JOUR
AU  - Suehle, John
AU  - Zhu, Baozhong
AU  - Chen, Yuan
AU  - Bernstein, J
C2  - Microelectronics Reliability
DA  - 2005-02-28 00:02:00
LA  - en
M1  - 45
PB  - Microelectronics Reliability
PY  - 2005
TI  - Detailed Study and Projection of Hard Breakdown Evolution in Ultra-Thin Gate Oxides
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31833
ER  -