TY  - CONF
AU  - Michael Cresswell
AU  - John Bonevich
AU  - T Headley
AU  - Richard Allen
AU  - Lucille Giannuzzi
AU  - Sarah Everist
AU  - Rathindra Ghoshtagore
AU  - Patrick Shea
C2  - SPIE - The International Society for Optical Engineering, Gaithersburg, MD, USA
DA  - 2000-06-01 00:06:00
LA  - en
M1  - 3998
PB  - SPIE - The International Society for Optical Engineering, Gaithersburg, MD, USA
PY  - 2000
TI  - Comparison of Electrical CD Measurements and Cross-Section Lattice-Plane Counts of Sub-Micrometer Features Replicated in (100) Silicon-on-Insulator Material
ER  -