TY  - CONF
AU  - Michael Cresswell
AU  - Ronald Dixson
AU  - William Guthrie
AU  - Richard Allen
AU  - Christine Murabito
AU  - Brandon Park
AU  - Joaquin Martinez
AU  - Amy Hunt
C2  - SPIE 30th International Symposium Microlithography, San Jose, CA, USA
DA  - 2005-05-30 00:05:00
LA  - en
M1  - 5752
PB  - SPIE 30th International Symposium Microlithography, San Jose, CA, USA
PY  - 2005
TI  - Critical Dimension Reference Features with Sub-Five Nanometer Uncertainty
ER  -