TY  - GEN
AU  - Michael Cresswell
AU  - Richard Allen
AU  - Ronald Dixson
AU  - William Guthrie
AU  - Christine Murabito
AU  - Brandon Park
AU  - Joaquin Martinez
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2005-03-02 00:03:00
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2005
TI  - Report of Investigation of RM 8111: Single-Crystal Critical Dimension Prototype Reference Materials
ER  -