TY  - CONF
AU  - Chidubem Nwokoye
AU  - Mona Zaghloul
AU  - Michael Cresswell
AU  - Richard Allen
AU  - Christine Murabito
C2  - SPIE, Monterey, CA, USA
DA  - 2006-10-01 00:10:00
LA  - en
PB  - SPIE, Monterey, CA, USA
PY  - 2006
TI  - A New Critical Dimension Metrology for Chrome-on-Glass Substrates Based ons-Parameter Measurements Extracted from Coplanar Waveguide Test Structures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32422
ER  -