TY  - CONF
AU  - John Suehle
AU  - Eric Vogel
AU  - Monica Edelstein
AU  - Curt Richter
AU  - Nhan Nguyen
AU  - Igor Levin
AU  - Debra Kaiser
AU  - Hanchang Wu
AU  - J Bernstein
C2  - Proc., 2001 International Symposium on Plasma and Process-Induced Damage, Monterey, CA, USA
DA  - 2001-05-13 00:05:00
LA  - en
PB  - Proc., 2001 International Symposium on Plasma and Process-Induced Damage, Monterey, CA, USA
PY  - 2001
TI  - Challenges of High-[kappa] Gate Dielectrics for Future MOS Devices
ER  -