TY  - CONF
AU  - Nhan Nguyen
AU  - Jin-Ping Han
AU  - Yong Cho
AU  - Wenjuan Zhu
AU  - Zhijiong Luo
AU  - T Ma
C2  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, US
DA  - 2003-09-30 00:09:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology: 2003, Austin, TX, US
PY  - 2003
TI  - Optical properties of Jet-Vapor-Deposited TiAlO and HfAlO Determined by Vacuum Utraviolet Spectroscopic Elliposmetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31379
ER  -