TY - CONF AU - Byron Shulver AU - Andrew Bunting AU - Alan Gundlach AU - Les Haworth AU - Alan Ross AU - A. Smith AU - Anthony Snell AU - J. Stevenson AU - Anthony Walton AU - Michael Cresswell AU - Richard Allen C2 - 2007 International Conference on Microlectronic Test Structures, Tokyo, 1, JA DA - 2007-03-22 00:03:00 LA - en PB - 2007 International Conference on Microlectronic Test Structures, Tokyo, 1, JA PY - 2007 TI - Extraction of Sheet Resistance and Linewidth from All-Copper ECD Test-Structures Fabricated from Silicon Preforms UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32582 ER -