TY  - CONF
AU  - Myongjai Lee
AU  - Jen-Hau Cheng
AU  - Kristine Bertness
AU  - Norman Sanford
AU  - Dragos Seghete
AU  - Steven George
AU  - Y.C. Lee
C2  - Transducers 2009, Denver, CO, US
DA  - 2009-06-20 00:06:00
LA  - en
PB  - Transducers 2009, Denver, CO, US
PY  - 2009
TI  - Atomic layer deposition enabled interconnect technology for vertical nanowire array devices
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902321
ER  -