TY  - CONF
AU  - J. Vahakangas
AU  - Markku Lahti
AU  - M Chang
AU  - H Edward
AU  - C Machala
AU  - R Martin
AU  - V Zavyalov
AU  - J McMurray
AU  - C. Williams
AU  - P DeWolf
C2  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
DA  - 1998-12-31 00:12:00
LA  - en
PB  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
PY  - 1998
TI  - Dopant Characterization Round-Robin Study Performed on Two-Dimensional Test Structures Fabricated at Texas Instruments
ER  -