TY  - CONF
AU  - Kopanski, Joseph
AU  - Marchiando, Jay
AU  - Rennex, Brian
C2  - Tech. Dig., 2000 International Microprocesses and Nanotechnology Conference,  Tokyo, 1, JA
DA  - 2000-12-31 00:12:00
LA  - en
PB  - Tech. Dig., 2000 International Microprocesses and Nanotechnology Conference,  Tokyo, 1, JA
PY  - 2000
TI  - Scanning Capacitance Microscopy for Measuring Device Carrier Profiles beyond the 100 nm Generation
ER  -