TY  - JOUR
AU  - C Silvestre
AU  - P Thompson
AU  - G Jernigan
AU  - David Simons
C2  - Journal of Vacuum Science and Technology A
DA  - 1998-07-01 00:07:00
LA  - en
M1  - 16
PB  - Journal of Vacuum Science and Technology A
PY  - 1998
TI  - Boron Incorporation With and Without Atomic Hydrogen During the Growth of Doped Layers on Si(100)
ER  -