TY - CONF AU - H Hofsaess AU - J Biegel AU - C Ronning AU - Robert Downing AU - George Lamaze C2 - Materials Research Society, Pittsburgh, PA, USA DA - 1997-12-01 00:12:00 LA - en M1 - 316 PB - Materials Research Society, Pittsburgh, PA, USA PY - 1997 TI - Characterization of Doped Diamond Like Carbon Films and Multilayers ER -