TY - JOUR AU - Heather Chen-Mayer AU - George Lamaze AU - Kevin Coakley AU - Sushil Satija C2 - Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment DA - 2003-06-01 00:06:00 LA - en M1 - 505 PB - Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment PY - 2003 TI - Two Aspects of Thin Film Analysis: Boron Profile and Scattering Length Density Profile ER -