TY  - CONF
AU  - Michael Cresswell
AU  - Nadine Guillaume
AU  - Richard Allen
AU  - William Guthrie
AU  - Rathindra Ghoshtagore
AU  - James OwenI II
AU  - Z. Osborne
AU  - N. Sullivan
AU  - Loren Linholm
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Kanazawa, US
DA  - 1998-12-31 00:12:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Kanazawa, US
PY  - 1998
TI  - Extraction of Sheet-Resistance from Four-Terminal Sheet Resistors in Monocrystalline Films Having Non-Planar Geometries
ER  -