TY  - JOUR
AU  - Nguyen, Nhan
AU  - Richter, Curt
AU  - Cho, Yong
AU  - Alers, G
AU  - Stirling, L.
C2  - Applied Physics Letters
DA  - 2000-11-06 00:11:00
LA  - en
M1  - 77
PB  - Applied Physics Letters
PY  - 2000
TI  - Effects of High Temperature Annealing on the Dielectric Function of Ta<sub>2</sub>O<sub>5</sub> Films Observed by Spectroscopic Ellipsometry
ER  -