TY - JOUR
AU - Nhan Nguyen
AU - Curt Richter
AU - Yong Cho
AU - G Alers
AU - L. Stirling
C2 - Applied Physics Letters
DA - 2000-11-06 00:11:00
LA - en
M1 - 77
PB - Applied Physics Letters
PY - 2000
TI - Effects of High Temperature Annealing on the Dielectric Function of Ta2O5 Films Observed by Spectroscopic Ellipsometry
ER -