TY  - JOUR
AU  - Maritoni Litorja
AU  - Steven Buntin
C2  - Journal of Vacuum Science and Technology A
DA  - 2002-01-01 00:01:00
LA  - en
M1  - 20
PB  - Journal of Vacuum Science and Technology A
PY  - 2002
TI  - Oxidation of Deuterium-, Acetylene-, and Ethylene-Terminated Si(100) by Atomic Oxygen
ER  -