TY  - CONF
AU  - J Scott
AU  - Eric Windsor
AU  - D Brady
AU  - J Canterbury
AU  - A. Karamcheti
AU  - W Chism
AU  - A Diebold
C2  - Characterization and Metrology for ULSI Technology Conference, xxxx, US
DA  - 2000-01-01 00:01:00
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology Conference, xxxx, US
PY  - 2000
TI  - Gate Dielectric Thickness Metrology Using Transmission Electron Microscopy
ER  -