TY - CONF AU - Papa Amoah AU - Jesus Perez AU - Yaw Obeng C2 - 2020 INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, April 6-9, EDINBURGH, UNITED KINGDOM, Edinburgh, UK DA - 2020-06-04 00:06:00 DO - https://doi.org/10.1109/ICMTS48187.2020.9107926. LA - en PB - 2020 INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, April 6-9, EDINBURGH, UNITED KINGDOM, Edinburgh, UK PY - 2020 TI - Application of Broadband RF Metrology to Integrated Circuit Interconnect Reliability Analyses: Monitoring Copper Interconnect Corrosion in 3D-ICs UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929468 ER -