TY  - JOUR
AU  - Alexander Tselev
AU  - Jeffrey Fagan
AU  - Andrei Kolmakov
C2  - Applied Physics Letters
DA  - 2018-12-27 00:12:00
DO  - https://doi.org/10.1063/1.5049592
LA  - en
M1  - 113
PB  - Applied Physics Letters
PY  - 2018
TI  - In-situ near-field probe microscopy of plasma processing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925358
ER  -