TY  - JOUR
AU  - David Bishop
AU  - Flavio Pardo
AU  - Cris Bolle
AU  - Randy Giles
AU  - Vladimir Aksyuk
C2  - Journal of Low Temperature Physics
DA  - 2012-12-12 00:12:00
LA  - en
M1  - 169
PB  - Journal of Low Temperature Physics
PY  - 2012
TI  - Silicon Micromachines for Fun and Profit
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917882
ER  -