TY  - JOUR
AU  - Heather Patrick
AU  - Thomas Germer
AU  - Yifu Ding
AU  - Hyun
AU  - Lee Richter
AU  - Christopher Soles
C2  - Applied Physics Letters
DA  - 2008-12-09
LA  - en
M1  - 93
PB  - Applied Physics Letters
PY  - 2008
TI  - Scatterometry for in situ measurement of pattern reflow in nanoimprinted polymers
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=900878
ER  -