TY  - CONF
AU  - Heather Patrick
AU  - Thomas Germer
C2  - Proceedings of the SPIE Meeting | Annual | 2007 |
DA  - 2007-10-01
LA  - en
M1  - 6672
PB  - Proceedings of the SPIE Meeting | Annual | 2007 |
PY  - 2007
TI  - Progress Towards Traceable Nanoscale Optical Critical Dimension Metrology for Semiconductors
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841133
ER  -