TY - CONF AU - J Stover AU - Sven Schroeder AU - Thomas Germer C2 - Reflection, Scattering, and Diffraction from Surfaces III, San Diego, CA, US DA - 2012-09-27 00:09:00 DO - https://doi.org/10.1117/12.930770 LA - en M1 - 8495 PB - Reflection, Scattering, and Diffraction from Surfaces III, San Diego, CA, US PY - 2012 TI - Upper roughness limitations on the TIS/RMS relationship ER -