TY  - CONF
AU  - Vladimir Ukraintsev
AU  - Ndubuisi Orji
AU  - Theodore Vorburger
AU  - Ronald Dixson
AU  - Joseph Fu
AU  - Richard Silver
C2  - Metrology, Inspection, and Process Control for Microlithography XXVI, Proceedings of SPIE Volume: 8324, San Jose, CA, US
DA  - 2012-04-09 00:04:00
LA  - en
PB  - Metrology, Inspection, and Process Control for Microlithography XXVI, Proceedings of SPIE Volume: 8324, San Jose, CA, US
PY  - 2012
TI  - On CD-AFM bias related to probe bending
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910903
ER  -