TY  - JOUR
AU  - L Sung
AU  - G Mulholland
AU  - Thomas Germer
C2  - Surface Characterization for Computer Disks Wafers and Flat Panel Displays SPIE
DA  - 1999-01-01 00:01:00
LA  - en
M1  - 3619
PB  - Surface Characterization for Computer Disks Wafers and Flat Panel Displays SPIE
PY  - 1999
TI  - Polarization of Light Scattered by Particles on Silicon Wafers, ed. by J.C. Stover
ER  -