TY  - JOUR
AU  - J Burnett
AU  - Zachary Levine
AU  - Eric Shirley
C2  - Semiconductor Fabtech 15<sup>th</sup>
DA  - 2002-01-01 00:01:00
LA  - en
PB  - Semiconductor Fabtech 15<sup>th</sup>
PY  - 2002
TI  - Intrinsic Birefringence in Crystalline Optical Materials for 193 nm and 157 nm Lithography
ER  -