TY - JOUR AU - J Burnett AU - Simon Kaplan C2 - Optical Microlithography XVI Proc SPIE 5040 DA - 2003-01-01 00:01:00 LA - en M1 - 5040 PB - Optical Microlithography XVI Proc SPIE 5040 PY - 2003 TI - Measurement of the refractive index and thermo-optic coefficient of water near 193nm, ed. by A. Yen ER -