TY  - JOUR
AU  - M Edamura
AU  - Eric Benck
AU  - Yicheng Wang
C2  - Journal of Vacuum Science and Technology A
DA  - 2021-10-12 15:10:24
LA  - en
PB  - Journal of Vacuum Science and Technology A
PY  - 2021
TI  - Time-Resolved Measurements of the E-to-H Mode Transition in Electronegative Pulse-Modulated Inductively Coupled Plasmas
ER  -