TY  - JOUR
AU  - B Ji
AU  - S Motika
AU  - P Badowski
AU  - S Dheandhanoo
AU  - C Timmons
AU  - D Hess
AU  - Eric Benck
AU  - Y Ye
C2  - Abstracts Of Papers Of The American Chemical Society
DA  - 2021-10-12 15:10:24
LA  - en
PB  - Abstracts Of Papers Of The American Chemical Society
PY  - 2021
TI  - The Role of Fluorine Chemistry in Anisotropic Etching of Dielectric Materials
ER  -