TY  - JOUR
AU  - Chengqing Wang
AU  - Wei-En Fu
AU  - Bin Li
AU  - Huai Huang
AU  - Christopher Soles
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - Paul Ho
AU  - Michael Cresswell
C2  - Thin Solid Films
DA  - 2009-03-16 00:03:00
LA  - en
M1  - 517
PB  - Thin Solid Films
PY  - 2009
TI  - Small Angle X-Ray Scattering Measurements of Spatial Dependent Linewidth in Dense Nanoline Gratings
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854130
ER  -