TY  - JOUR
AU  - Joseph~undefined~undefined~undefined~undefined~undefined Lenhart
AU  - Daniel Fischer
AU  - S Sambasivan
AU  - Eric Lin
AU  - Ronald Jones
AU  - Christopher Soles
AU  - Wen-Li Wu
AU  - D Goldfarb
AU  - M Angelopoulos
C2  - SPIE International Society for Optical Engineering
DA  - 2003-02-01 00:02:00
LA  - en
M1  - 5039
PB  - SPIE International Society for Optical Engineering
PY  - 2003
TI  - X-Ray Absorption Spectroscopy to Probe Interfacial Issues in Photolithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852098
ER  -