TY  - JOUR
AU  - Joseph~undefined~undefined~undefined~undefined~undefined Lenhart
AU  - Daniel Fischer
AU  - S Sambasivan
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - Douglas Guerrero
AU  - Yijun Wang
AU  - R Puligadda
C2  - Applied Surface Science
DA  - 2021-10-12 15:10:24
LA  - en
PB  - Applied Surface Science
PY  - 2021
TI  - Understanding Deviations in Lithographic Patterns Near Interfaces: Characterization of Antireflective Coatings (ARC) and the ARC/Resist Interface
ER  -