TY - CONF AU - M Sahiner AU - J. Sarrao AU - M Carroll AU - C Magee AU - S Novak AU - Joseph Woicik C2 - Proceedings for the MRS Spring Meeting, Undefined DA - 2021-10-12 15:10:24 LA - en PB - Proceedings for the MRS Spring Meeting, Undefined PY - 2021 TI - XAFS as a Direct Local Structural Probe in Revealing the Effects of a C Presence in B Diffusion in SiGe Layers ER -