TY  - JOUR
AU  - E Kondoh
AU  - M Baklanov
AU  - Eric Lin
AU  - D Gidley
AU  - A Nakashima
C2  - Japanese Journal of Applied Physics Part 2: Letters
DA  - 2001-04-01 00:04:00
LA  - en
M1  - 40
PB  - Japanese Journal of Applied Physics Part 2: Letters
PY  - 2001
TI  - Comparative Study of Pore Size of Low-Dielectric-Constant Porous Spin-On-Glass Films Using Different Methods of Nondestructive Instrumentation
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851851
ER  -