TY  - CONF
AU  - M Tanaka
AU  - John Villarrubia
AU  - Andras Vladar
C2  - Proceedings of SPIE, San Jose, CA, USA
DA  - 2005-03-03 00:03:00
LA  - en
M1  - 5752
PB  - Proceedings of SPIE, San Jose, CA, USA
PY  - 2005
TI  - Influence of Focus Variation on Linewidth Measurements
ER  -