TY  - JOUR
AU  - Suresh Donthu
AU  - Nasim Alem
AU  - Zixlao Pan
AU  - Shu-you Li
AU  - Gajendra Shekhawat
AU  - Vinayak Dravid
AU  - Kurt Benkstein
AU  - Stephen Semancik
C2  - IEEE Transactions on Nanotechnology
DA  - 2008-05-01 00:05:00
DO  - https://doi.org/10.1109/TNANO.2008.917793
LA  - en
M1  - 7
PB  - IEEE Transactions on Nanotechnology
PY  - 2008
TI  - Directed Fabrication of Ceramic Nanostructures on Fragile Substrates Using Soft-Electron Beam Lithography (soft-eBL)
ER  -