TY - VIDEO AU - Joseph Kopanski AU - Erik Collart C2 - American Vacuum Society Newsletter DA - 2003-10-30 00:10:00 LA - en PB - American Vacuum Society Newsletter PY - 2003 TI - AVS Newsletter Conference Report USJ-2003: The Seventh International Workshop on: Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors ER -