TY - JOUR AU - Nile Oldham AU - John Kramar AU - P. Hetrick AU - E Teague C2 - J. Amer. Soc. of Precision Engineering DA - 1993-07-01 12:07:00 LA - en PB - J. Amer. Soc. of Precision Engineering PY - 1993 TI - Electronic Limitations in Phase Meters for Heterodyne Interferometry UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=22814 ER -