TY  - JOUR
AU  - Jay Marchiando
AU  - Joseph Kopanski
C2  - Journal of Applied Physics
DA  - 2002-11-15 00:11:00
LA  - en
M1  - 92
PB  - Journal of Applied Physics
PY  - 2002
TI  - Regression Procedure for Determining the Dopant Profile in Semiconductors from Scanning Capacitance Microscopy Data
ER  -