TY  - JOUR
AU  - James Olthoff
AU  - Yicheng Wang
C2  - Journal of Vacuum Science and Technology A
DA  - 1999-07-01 00:07:00
LA  - en
PB  - Journal of Vacuum Science and Technology A
PY  - 1999
TI  - Studies of Ion Bombardment in High Density Plasmas Containing CF<sub>4</sub>
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=6462
ER  -