TY  - CONF
AU  - Curt Richter
AU  - Nhan Nguyen
AU  - Joseph Dura
AU  - Charles Majkrzak
C2  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
DA  - 1998-07-01 00:07:00
LA  - en
PB  - Proc., 1998 International Conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
PY  - 1998
TI  - Characterization of Thin SiO<sub>2</sub> on Si by Spectroscopic Ellipsometry, Neutron Reflectometry, and X-Ray Reflectometry
ER  -