TY - CONF AU - David Simons AU - P Chi AU - R. Downing AU - James Ehrstein AU - J. Knudsen C2 - Proc., SIMS-VI, Secondary Ion Mass Spectrometry Conference, Versailles, 1, FR DA - 1988-12-31 00:12:00 LA - en PB - Proc., SIMS-VI, Secondary Ion Mass Spectrometry Conference, Versailles, 1, FR PY - 1988 TI - Progress Toward a Semiconductor Depth-Profiling Standard ER -