TY  - CONF
AU  - David Simons
AU  - P Chi
AU  - R. Downing
AU  - James Ehrstein
AU  - J. Knudsen
C2  - Proc., SIMS-VI, Secondary Ion Mass Spectrometry Conference, Versailles, 1, FR
DA  - 1988-12-31 00:12:00
LA  - en
PB  - Proc., SIMS-VI, Secondary Ion Mass Spectrometry Conference, Versailles, 1, FR
PY  - 1988
TI  - Progress Toward a Semiconductor Depth-Profiling Standard
ER  -